Précédent
Suivant
Brevet : EP0982320 - POLYMERES ABSORBANT LA LUMIERE ET LEUR APPLICATION A UN FILM ANTIREFLET
Titre
POLYMERES ABSORBANT LA LUMIERE ET LEUR APPLICATION A UN FILM ANTIREFLET
N° et date de publication de la demande
EP0982320 - 01/03/2000
Type de la demande
A1
N° et date de dépôt
EP99907928.8 - 15/03/1999
N° et date de priorité
JP6662698 - 17/03/1998
Classification CIB
C08F 8/14 ; H01L 21/027 ; C08F 8/30 ; C08F 8/32 ; C08F 220/20 ; C08F 220/54 ; C08F 222/02 ; C08F 222/04 ; C09D 5/00 ; C09D 5/32 ; G03F 7/09 ; G03F 7/11
Classification CPC
C08F 8/14 ; C08F 8/30 ; C09D 5/32 ; G03F 7/091 ; C08F 8/14 ; C08F 8/14 ; C08F 8/30 ; C09D 5/32 ; G03F 7/091
Famille de brevets
US6255405B1 ; TW408251B ; JPH11263806A ; CN1258302A ; EP0982320A1 ; WO9947571A1 ; DE69932676T2 ; KR20010012648A
Abrégé
Résumé dans la langue de publication A high-performance anti-reflective coating which highly absorbs a given light, e.g., deep ultraviolet rays, tenaciously adheres to substrates upon coating formation, is satisfactory in covering, and eliminates the influence of standing waves in the production of integrated circuits; novel light-absorbing polymers for forming the anti-reflective coating; and a process for producing the polymers. One of the polymers is produced by esterifying a copolymer comprising carboxylic anhydride groups and/or dicarboxylic acid groups such as maleic acid as basic recurring units with a hydroxylated aromatic chromophore. The unreacted carboxylic acid groups or acid anhydride groups remaining in the esterified light-absorbing polymer may be amidated and/or imidized with an aminated aromatic compound. Each of these polymers is dissolved in an organic solvent comprising an alcohol, aromatic hydrocarbon, ketone, ester, or combination of these, and the solution is applied to a substrate and then baked to form an anti-reflective coating.
INTERVENANTS
Déposant
CLARIANT FINANCE BVI LTD (CLARIANT FINANCE (BVI) LIMITED) - VG
Titulaire
AZ Electronic Materials USA Corp.
Inventeur
KANG WEN-BING (KANG, WEN-BING) - JP
NISHIWAKI YOSHINORI (NISHIWAKI, YOSHINORI) - JP
KIMURA KEN (KIMURA, KEN) - JP
MATSUO SHOKO (MATSUO, SHOKO) - JP
TANAKA HATSUYUKI (TANAKA, HATSUYUKI) - JP
Mandataire
ISENBRUCK BOSL HORSCHLER - EASTSITE ONE SECKENHEIMER LANDSTRASSE 4 68163 MANNHEIM - DE
STATUT EN FRANCE : Brevet EP sans effet
Délivrance
09/08/2006
Non remise de traduction du brevet
11/05/2007 (BOPI 2007-19)
